Microscale to nanoscale ferroelectric domain and surface engineering of a near-stoichiometric LiNbO3 crystal

被引:101
作者
Terabe, K
Nakamura, M
Takekawa, S
Kitamura, K
Higuchi, S
Gotoh, Y
Cho, Y
机构
[1] Natl Inst Mat Sci, Tsukuba, Ibaraki 3050044, Japan
[2] Sci Univ Tokyo, Dept Mat Sci & Technol, Chiba 2788510, Japan
[3] Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan
关键词
D O I
10.1063/1.1538351
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have investigated microscale to nanoscale ferroelectric domain and surface engineering of a near-stoichiometric LiNbO3 crystal by using scanning force microscopy. The single crystals LiNbO3 fixed on metal substrates were polished to a 5 mum thickness. Artificial patterns of inverted-domain structures were fabricated in the samples, where polarization directions of the domains were switched by scanning the samples with a conductive cantilever while applying voltages. Furthermore, the negatively polarized surfaces in the patterns were preferentially etched in HF solution. As a result, cavity and mound-shaped surfaces were fabricated; these structures could be used to create functional templates and devices. (C) 2003 American Institute of Physics.
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页码:433 / 435
页数:3
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