共 47 条
[3]
Cedeño CC, 2002, MICROELECTRON ENG, V61-2, P25, DOI 10.1016/S0167-9317(02)00505-1
[4]
High-resolution organic polymer light-emitting pixels fabricated by imprinting technique
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2002, 20 (06)
:2877-2880
[7]
Sub-10 nm imprint lithography and applications
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1997, 15 (06)
:2897-2904