Characteristics modes of electrostatic comb-drive X-Y microactuators

被引：44

作者：

Harness, T ^{[1
]}

Syms, RRA ^{[1
]}

机构：

[1] Imperial Coll, Dept Elect & Elect Engn, Opt & Semicond Devices Sect, London SW7 2BT, England

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2000年 / 10卷 / 01期

关键词：

D O I：

10.1088/0960-1317/10/1/302

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The design of dual axis microengineered comb-drive electrostatic actuators is investigated. Experimental measurements of diode-isolated bulk micromachined x-y stages with a folded, single-flexure suspension show the presence of unwanted two-dimensional vibrational mode patterns. A combination of coupled-mode and finite-element analysis is used to explain the existence of the spurious modes, and good agreement is obtained with the experimental response provided that the intrinsic stress is taken into account. It is shown that improved performance can be obtained simply by doubling the number of suspension flexures.

引用

页码：7 / 14

页数：8

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