Large Scale Exchange Coupled Metallic Multilayers by Roll-to-Roll (R2R) Process for Advanced Printed Magnetoelectronics

被引:10
作者
Gupta, Preeti [1 ]
Karnaushenko, Dmitriy D. [2 ]
Becker, Christian [2 ]
Okur, Ibrahim E. [1 ]
Melzer, Michael [3 ]
Oezer, Burak [1 ,4 ]
Schmidt, Oliver G. [2 ]
Karnaushenko, Daniil [2 ]
机构
[1] Leibniz IFW Dresden, Inst Integrat Nanosci, D-01069 Dresden, Germany
[2] TU Chemnitz, Ctr Mat Architectures & Integrat Nanomembranes MA, D-09126 Chemnitz, Germany
[3] Bundesanstalt Mat Forsch & Prufung BAM, D-12205 Berlin, Germany
[4] Leibniz IFW Dresden, Inst Solid State Phys, D-01069 Dresden, Germany
关键词
giant magnetoresistance; large area deposition; magnetic ink; printed magnetoelectronics; roll-to-roll processing; GIANT MAGNETORESISTANCE; GMR SENSORS; ELECTRONICS;
D O I
10.1002/admt.202200190
中图分类号
T [工业技术];
学科分类号
120111 [工业工程];
摘要
Till now application of printed magnetoelectronics is hindered by lack of large area exchange coupled metallic multilayers required to produce printable magneto-sensory inks. Large-scale roll-to-roll (R2R) fabrication process is an attractive approach owing to its capabilities for high volume, high throughput, and large area manufacturing. Precise and high performance R2R sputtering technology is developed to fabricate large area giant magnetoresistive (GMR) thin-films stacks that contain 30 metallic bilayers prepared by continuous R2R sputtering of Co and Cu sequential on a hundred meters long polyethylene terephthalate (PET) web. The R2R sputtered Co/Cu multilayer on a 0.2 x 100 m(2) PET web exhibits a GMR ratio of approximate to 40% achieving the largest area exchange coupled room temperature magneto-sensitive system demonstrated to date. The prepared GMR thin-film is converted to magnetosensitive ink that enables printing of magnetic sensors with high performance in a cost-efficient way, which promotes integration with printed electronics. An average GMR ratio of approximate to 18% is obtained for 370 printed magnetic sensors. The realized precise R2R sputtering approach can also be extended to a wide range of hybrid thin-film material systems opening up a path for new functional inks applied with printing technologies.
引用
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页数:11
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