[1] Leibniz IFW Dresden, Inst Integrat Nanosci, D-01069 Dresden, Germany
[2] TU Chemnitz, Ctr Mat Architectures & Integrat Nanomembranes MA, D-09126 Chemnitz, Germany
[3] Bundesanstalt Mat Forsch & Prufung BAM, D-12205 Berlin, Germany
[4] Leibniz IFW Dresden, Inst Solid State Phys, D-01069 Dresden, Germany