Characterizing probe performance in the aberration corrected STEM

Sub-angstrom ngstrom imaging using the 120 kV IBM STEM is now routine if the probe optics is carefully controlled and fully characterized. However, multislice simulation using at least a frozen phonon approximation is required to understand the Annular Dark Field image contrast. Analysis of silicon dumbbell structures in the [1 10] and [2 1 1] projections illustrate this finding. Using fast image acquisition, atomic movement appears ubiquitous under the electron beam, and may be useful to illuminate atomic level processes. (c) 2006 Elsevier B.V. All rights reserved.