Aberration correction results in the IBM STEM instrument

被引：23

作者：

Batson, PE ^{[1
]}

机构：

[1] IBM Res Corp, Yorktown Hts, NY 10598 USA

来源：

ULTRAMICROSCOPY | 2003年 / 96卷 / 3-4期

关键词：

electron microscopy; aberration correction; quadrupole-octupole corrector; scanning transmission electron microscopy;

D O I：

10.1016/S0304-3991(03)00091-3

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Results from the installation of aberration correction in the IBM 120 kV STEM argue that a sub-angstrom probe size has been achieved. Results and the experimental methods used to obtain them are described here. Some post-experiment processing is necessary to demonstrate the probe size of about 0.078 run. While the promise of aberration correction is demonstrated, we remain at the very threshold of practicality, given the very stringent stability requirements. (C) 2003 Elsevier B.V. All rights reserved.

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收藏

页码：239 / 249

页数：11

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