Capacitance-voltage curve recovery of MOS capacitors passivated with BaF2-BeF2-SiO2-B2O3-P2O5 glasses

被引：5

作者：

Kobayashi, K

机构：

[1] Toshiba ULSI Research Center, Kawasaki

来源：

JOURNAL OF MATERIALS CHEMISTRY | 1997年 / 7卷 / 01期

关键词：

D O I：

10.1039/a602563c

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The capacitance-voltage (C-V) characteristics of metal-oxide-silicon (MOS) capacitors passivated by bubbled BaF2-BeF2-SiO2-B2O3-P2O5 glasses with various water and fluoride contents have been investigated. As the absorption coefficients of OH- ions increased, adverse effects on the recovery of hysteresis loops of the C-V curves and their shifts were observed. The water content is related closely to the fluoride content in these glasses. A bubbling technique for blowing dry air through the molten glass during melting was effective for the removal of OH- ions in the fluoride-containing glasses.

引用

页码：127 / 129

页数：3

共 19 条

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[2] HYDROGEN-CONTAINING GLASS AND GAS-CERAMIC MICROFOAMS - RAMAN, XPS-NMR, AND MAS-NMR RESULTS ON THE STRUCTURE OF PRECURSOR SIO2-B2O3-P2O5 GLASSES [J].