Sol-gel synthesis, comparative characterisation, and reliability analyses of undoped and Al-doped zinc oxide thin films

被引:14
作者
Copuroglu, Mehmet [1 ]
O'Brien, Shane [1 ]
Crean, Gabriel M. [1 ,2 ]
机构
[1] Tyndall Natl Inst, Cork, Ireland
[2] Natl Univ Ireland Univ Coll Cork, Dept Microelect Engn, Cork, Ireland
关键词
Zinc oxide; Sol-gel method; Doping; Reliability; OPTICAL-PROPERTIES; ZNO; MICROSTRUCTURE;
D O I
10.1016/j.tsf.2009.02.056
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Thin films of sol-gel derived undoped and Al-doped zinc oxide material systems were fabricated for potential use in transparent conducting oxide modules. A comparative characterisation of the functional properties of the films was performed. Undoped zinc oxide thin films were obtained with desired properties. Al doping reduced the average crystallite size, and led to a denser and less porous morphology, and also caused an increase in transparency in the UV region. An improvement in electrical conductivity was achieved upon Al doping. Temperature cycling and accelerated delamination test results demonstrated the high physical reliability of the thin films of the material system obtained in this study. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:6323 / 6326
页数:4
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