Effects of catalyst pre-treatment on the growth of single-walled carbon nanotubes by microwave CVD

被引:13
作者
Bartsch, K. [1 ]
Arnold, B. [1 ]
Kaltofen, R. [1 ]
Taeschner, C. [1 ]
Thomas, J. [1 ]
Leonhardt, A. [1 ]
机构
[1] Leibniz Inst Solid State & Mat Res Dresden, D-1069 Dresden, Germany
关键词
D O I
10.1016/j.carbon.2006.10.022
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Layers of carbon nanotubes were deposited by microwave CVD on oxidized silicon substrates coated with Al-Fe-Mo catalyst films. To achieve a tube growth at about 973 K, the ion bombardment of the catalyst surface has to be avoided. The appropriate pre-treatment of the substrates is essential for the deposition of single-walled carbon nanotubes. Annealing in air is preferable to the frequently used reducing pre-treatment prior to the deposition as a higher area density of the tubes and a better reproducibility of deposition can be obtained. To figure out this finding, selected samples were investigated by analytical transmission electron microscopy and Raman spectroscopy. It is shown that the pre-treatment has a strong effect on the size and distribution of the catalyst particles. (c) 2006 Elsevier Ltd. All rights reserved.
引用
收藏
页码:543 / 552
页数:10
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