Scanning nonlinear dielectric microscopy - a high resolution tool for observing ferroelectric domains and nano-domain engineering

被引:5
作者
Cho, Y [1 ]
机构
[1] Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan
关键词
scanning nonlinear dielectric microscopy; ferroelectric domain; higher order nonlinear dielectric microscopy; three-dimensional measurement; ferroelectric data storage;
D O I
10.1080/10584580290172224
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A sub-nanometer resolution scanning nonlinear dielectric microscope (SNDM) was developed for the observation of ferroelectric polarization. We also demonstrate that the resolution of SNDM is higher than that of a conventional piezo-response imaging. Next, we report new SNDM technique detecting higher nonlinear dielectric constants epsilon(3333) and epsilon(33333). It is expected that higher order nonlinear dielectric imaging will provide higher lateral and depth resolution. Moreover, a new type of scanning nonlinear dielectric microscope probe, called the epsilon(311)-type probe, and a system to measure the ferroelectric polarization component parallel to the surface is developed. Finally, the formation of artificial small inverted domain is reported to demonstrate that SNDM system is very useful as a nano-domain engineering tool. The nano-size domain dots were successfully formed in LiTaO3 single crystal. This means that we can obtain a very high density ferroelectric data storage with the density above T-bits/inch(2) .
引用
收藏
页码:189 / 198
页数:10
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