Theoretical and experimental study on nanoscale ferroelectric domain measurement using scanning nonlinear dielectric microscopy

被引：52

作者：

Odagawa, H ^{[1
]}

Cho, Y ^{[1
]}

机构：

[1] Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2000年 / 39卷 / 9B期

关键词：

scanning nonlinear dielectric microscopy; nano-scale ferroelectric domain; sub-nanometer resolution; nonlinear dielectric constant;

D O I：

10.1143/JJAP.39.5719

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We describe theoretical and experimental studies for nano-scale ferroelectric domain measurements using scanning nonlinear dielectric microscopy (SNDM). We calculate one-dimensional images of a 180 degrees c-e domain boundary and show that SNDM has an atomic-scale resolution theoretically. Experimental results show that we measure the c-e domain on the lead zirconate titanate (PZT) thin film with the width of 1.5 nm and that the resolution of the microscope is less than 0.5 nm.

引用

页码：5719 / 5722

页数：4

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