Impedance spectroscopy characterization of resistance switching NiO thin films prepared through atomic layer deposition

被引:121
作者
You, Yil-Hwan
So, Byung-Soo
Hwang, Jin-Ha [1 ]
Cho, Wontae
Lee, Sun Sook
Chung, Taek-Mo
Kim, Chang Gyoun
An, Ki-Seok
机构
[1] Hongik Univ, Dept Mat Sci & Engn, Seoul 121791, South Korea
[2] Korea Res Inst Chem Technol, Film Mat Lab, Taejon 305600, South Korea
关键词
D O I
10.1063/1.2392991
中图分类号
O59 [应用物理学];
学科分类号
摘要
To understand electrical/dielectric phenomena and the origins of bistable resistive switching, impedance spectroscopy was applied to NiO thin films prepared through atomic layer deposition. The dc current-voltage characteristics of the NiO thin films were also determined. Frequency-dependent characterizations indicated that the switching and memory phenomena in NiO thin films did not originate from the non-Ohmic effect at the electrode/NiO interfaces but from the bulk-related responses, i.e., from an electrocomposite where highly conducting components are distributed in the insulating NiO matrix. Low dielectric constants and bias-independent capacitance appeared to corroborate the bulk-based responses in resistive switching in NiO thin films.
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页数:3
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