Radius of curvature measurement of spherical smooth surfaces by multiple-beam interferometry in reflection

被引：49

作者：

Abdelsalam, D. G. ^{[2
]}

Shaalan, M. S. ^{[2
]}

Eloker, M. M. ^{[3
]}

Kim, Daesuk ^{[1
]}

机构：

[1] Chonbuk Natl Univ, Div Mech Syst Engn, Jeonju 561756, South Korea

[2] Natl Inst Stand, Engn & Surface Metrol Lab, El Haram, El Giza, Egypt

[3] Al Azhar Univ, Fac Sci, Dept Phys, Cairo, Egypt

来源：

OPTICS AND LASERS IN ENGINEERING | 2010年 / 48卷 / 06期

关键词：

Curved surfaces; Multiple-beam; Flat fielding; Zernike Polynomial; Ray tracing; LONG-RADIUS;

D O I：

10.1016/j.optlaseng.2010.02.007

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In this paper a method is presented to accurately measure the radius of curvature of different types of curved surfaces of different radii of curvatures of 38 000,18 000 and 8000 mm using multiple-beam interference fringes in reflection. The images captured by the digital detector were corrected by flat fielding method. The corrected images were analyzed and the form of the surfaces was obtained. A 3D profile for the three types of surfaces was obtained using Zernike polynomial fitting. Some sources of uncertainty in measurement were calculated by means of ray tracing simulations and the uncertainty budget was estimated within lambda/40. (C) 2010 Elsevier Ltd. All rights reserved.

引用

页码：643 / 649

页数：7

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