Ultra-hard Ti-B-N coatings obtained by magnetron sputtering

被引：23

作者：

Heau, C

Guillon, N

Fillit, RY

Machet, J

机构：

[1] Hydromecan & Frottement, F-42026 Andrezieux Boutheon, France

[2] Ecole Natl Super Mines, F-42023 St Etienne, France

[3] Fac Sci, LMCTS Grp PVD, F-87060 Limoges, France

来源：

SURFACE & COATINGS TECHNOLOGY | 1997年 / 97卷 / 1-3期

关键词：

mechanical properties; reactive magnetron co-sputtering; titanium boronitride;

D O I：

10.1016/S0257-8972(97)00191-6

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Titanium boronitride coatings were deposited by reactive magnetron cosputtering. The Ti and the TiB2 targets were sputtered by using an Ar-N-2 gas mixture. The deposition configuration allowed us to obtain a composition gradient along the substrate length. The coatings have been characterized by reflectivity measurements and X-ray diffraction while, for mechanical applications, scratch tests, hardness indentations and wear tests were used. The zone explored in the Ti-B-N diagram shows very different behavior with chemical composition. Coatings 10 mu m thick with 6000 HV hardness exhibit wear rates nine times lower than those of TIN coatings. (C) 1997 Elsevier Science S.A.

引用

页码：60 / 65

页数：6

共 13 条

[1] TRIBOLOGICAL PROPERTIES OF RF-SPUTTERED TI-B-N COATINGS UNDER VARIOUS PIN-ON-DISC WEAR TEST CONDITIONS [J].