Carbon nanotube growth by PECVD: a review

被引:641
作者
Meyyappan, M [1 ]
Delzeit, L [1 ]
Cassell, A [1 ]
Hash, D [1 ]
机构
[1] NASA, Ames Res Ctr, Moffett Field, CA 94035 USA
关键词
D O I
10.1088/0963-0252/12/2/312
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Carbon nanotubes (CNTs), due to their unique electronic and extraordinary mechanical properties, have been receiving much attention for a wide variety of applications. Recently, plasma enhanced chemical vapour deposition (PECVD) has emerged as a key growth technique to produce vertically-aligned nanotubes. This paper reviews various plasma sources currently used in CNT growth, catalyst preparation and growth results. Since the technology is in its early stages, there is a general lack of understanding of growth mechanisms, the role of the plasma itself, and the identity of key species responsible for growth. This review is aimed at the low temperature plasma research community that has successfully addressed such issues, through plasma and surface diagnostics and modelling, in semiconductor processing and diamond thin film growth.
引用
收藏
页码:205 / 216
页数:12
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