Piezoelectric ultrasonic micromotor with 1.5 mm diameter

被引：88

作者：

Dong, SX ^{[1
]}

Lim, SP

Lee, KH

Zhang, JD

Lim, LC

Uchino, K

机构：

[1] Penn State Univ, Int Ctr Transducers & Actuators, Inst Mat Res, University Pk, PA 16802 USA

[2] Virginia Tech, Dept Mat Sci & Engn, Blacksburg, VA 24061 USA

[3] Natl Univ Singapore, Fac Engn, Singapore 119260, Singapore

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2003年 / 50卷 / 04期

关键词：

D O I：

10.1109/TUFFC.2003.1197958

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

A piezoelectric ultrasonic micrometer has been developed using a lead zirconate titanate (PZT) ceramic/metal composite tube stator that was 1.5 mm in diameter and 7 mm in length. The micrometer was operated in its first bending vibration mode (similar to70 kHz), producing speeds from hundreds to over 2000 rpm in both rotational directions. The maximum torque-output was 45 muN-m, which is far superior to previous PZT thin film-based micrometers. This micrometer showed good reliability and stability for more than 300 hours of continued operation.

引用

页码：361 / 367

页数：7

共 14 条

[1] ELECTROMECHANICAL DEFLECTIONS OF PIEZOELECTRIC TUBES WITH QUARTERED ELECTRODES [J].

CHEN, CJ .

APPLIED PHYSICS LETTERS, 1992, 60 (01) :132-134

[2]

DANEL JS, 1997, TRANSD 97 INT C SOL, P16

[3]

Flynn A. M., 1992, J MICROMECHANICAL SY, V1, P45

[4]

HAENER J, 1958, J APPL MECH, P412

[5] Piezoelectric micromotor using a metal-ceramic composite structure [J].

Koc, B ;

Bouchilloux, P ;

Uchino, K .

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2000, 47 (04) :836-843

[6]

*MAGS CORP, 1996, ATILA FIN EL COD ACT

[7] Design of a cylindrical ultrasonic micromotor to obtain mechanical output [J].

Morita, T ;

Kurosawa, M ;

Higuchi, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1996, 35 (5B) :3251-3254

[8] Cylindrical micro ultrasonic motor utilizing bulk lead zirconate titanate (PZT) [J].

Morita, T ;

Kurosawa, MK ;

Higuchi, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (5B) :3347-3350

[9]

MORITA T, 1997, TRANSD 97 INT C SOL

[10] FABRICATION AND CHARACTERIZATION OF PZT THIN-FILM VIBRATORS FOR MICROMOTORS [J].

MURALT, P ;

KOHLI, M ;

MAEDER, T ;

KHOLKIN, A ;

BROOKS, K ;

SETTER, N ;

LUTHIER, R .

SENSORS AND ACTUATORS A-PHYSICAL, 1995, 48 (02) :157-165

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