Superhard coatings of CNx/ZrN multilayers prepared by DC magnetron sputtering

被引：49

作者：

Wu, ML

Qian, WD

Chung, YW ^{[1
]}

Wang, YY

Wong, MS

Sproul, WD

机构：

[1] Northwestern Univ, Robert R Mccormick Sch Engn & Appl Sci, Dept Mat Sci & Engn, Evanston, IL 60208 USA

[2] Northwestern Univ, Adv Coatings Technol Grp, Evanston, IL 60201 USA

来源：

THIN SOLID FILMS | 1997年 / 308卷

基金：

美国国家科学基金会;

关键词：

magnetron sputtering; nanoindentor; hardness; X-ray diffraction;

D O I：

10.1016/S0040-6090(97)00429-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

CNx/ZrN multilayers were prepared by a dual-cathode unbalanced DC magnetron sputtering system. The results showed that under proper deposition conditions, the multilayer coatings were dense and fully crystalline with hardness exceeding 40 GPa and elastic modulus over 400 GPa, X-ray diffraction studies showed that there is a strong correlation between coating hardness and the occurrence of(lll) texture of ZrN. Some crystalline regions going through the multilayers were clearly observed from the cross-sectional high resolution transmission electron microscopy image. Two extra d-spacings were obtained from the diffraction pattern that do not belong to any known d-spacing for ZrN, but match with two calculated d-spacings for beta-C3N4. (C) 1997 Elsevier Science S.A.

引用

页码：113 / 117

页数：5

共 17 条

[1] ANALYTICAL ELECTRON-MICROSCOPY AND RAMAN-SPECTROSCOPY STUDIES OF CARBON NITRIDE THIN-FILMS [J].