Record tuning range of InP-based multiple air-gap MOEMS filter

被引：24

作者：

Daleiden, J ^{[1
]}

Rangelov, V

Irmer, S

Römer, F

Strassner, M

Prott, C

Tarraf, A

Hillmer, H

机构：

[1] Univ Kassel, Inst Microstruct Technol & Analyt, D-34132 Kassel, Germany

[2] Royal Inst Technol, KTH, S-16440 Kista, Sweden

来源：

ELECTRONICS LETTERS | 2002年 / 38卷 / 21期

关键词：

D O I：

10.1049/el:20020872

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Continuously tunable Fabry-Perot filters based on multiple InP/air-gap MOEMS technology are presented. Record wavelength tuning > 112 nm with an actuation voltage of only 5 V is demonstrated. The FWHM remains constant over the entire tuning range. The stopband covers both the second and third optical telecommunication window (1250-1800 nm).

引用

页码：1270 / 1271

页数：2

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