Diamond-DLC double layer used in corrosive protective coating

被引：12

作者：

Csorbai, H. K.

Kovach, G.

Peto, G.

Csikvari, P.

Karacs, A.

Solyom, A.

Hars, Gy.

Kalman, E.

机构：

[1] Hungarian Acad Sci, Chem Res Ctr, H-1525 Budapest, Hungary

[2] Tech Univ Budapest, Dept Atom Phys, H-1521 Budapest, Hungary

[3] Hungarian Acad Sci, Res Inst Tech Phys & Mat Sci, H-1525 Budapest, Hungary

来源：

APPLIED SURFACE SCIENCE | 2007年 / 253卷 / 11期

基金：

匈牙利科学研究基金会;

关键词：

diamond; corrosion; DLC; pinhole; protective layer;

D O I：

10.1016/j.apsusc.2006.11.030

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 [物理化学]; 081704 [应用化学];

摘要：

Pinhole-free diamond layers can widely be used in sensor technology as resistive coating against electrolyte solutions. The diamond layers created with chemical vapour deposition technique (CVD) are pinhole-free only above a certain thickness (at least 2.4 mu m). Such layer thicknesses reduce the application possibilities. On the other hand, thin (similar to 200 nm) diamond like carbon (DLC) layers deposited by pulsed laser deposition technique (PLD) are pinhole free but have adhesion or contiguity problems depending on layer thickness. Utilizing the advantages of these two techniques a combined method was developed in order to prepare a pinhole free thin diamond-DLC double layer, for corrosion protection coating. The effects of various deposition parameters (such as background gas, temperature, bias, layer thickness) on the protective properties of the layers have been studied. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：5070 / 5075

页数：6

共 20 条

[1]

THIN-FILM DIAMOND BY CHEMICAL-VAPOR-DEPOSITION METHODS [J].