Aerosol-assisted chemical vapour deposition of sodium fluoride thin films

被引：24

作者：

Binions, R ^{[1
]}

Carmalt, CJ ^{[1
]}

Parkin, IP ^{[1
]}

机构：

[1] UCL, Dept Chem, Christopher Ingold Labs, London WC1H 0AJ, England

来源：

THIN SOLID FILMS | 2004年 / 469卷

基金：

英国工程与自然科学研究理事会;

关键词：

sodium fluoride; thin film; aerosol-assisted chemical vapour deposition;

D O I：

10.1016/j.tsf.2004.06.178

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin films of sodium fluoride were created by the use of aerosol-assisted chemical vapour deposition between 200 and 600 degreesC on glass substrates. The films were found to be crystalline and single-phase (NaF) using X-ray diffraction. Scanning electron microscopy energydispersive analysis of X-rays gave coherent elemental compositions indicating that monophasic NaF was made with negligible impurity levels. The films appeared hazy and showed little optical transmission (5-10%) and reflectance (similar to2%). (C) 2004 Published by Elsevier B.V.

引用

页码：416 / 419

页数：4

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