Response time analysis of SiGe/Si modulation-doped multiple-quantum-well structures for optical modulation

被引:32
作者
Marris, D [1 ]
Cassan, E [1 ]
Vivien, L [1 ]
机构
[1] Univ Paris 11, CNRS, Inst Elect Fondamentale, Unite Mixte Rech, F-91405 Orsay, France
关键词
D O I
10.1063/1.1806995
中图分类号
O59 [应用物理学];
学科分类号
摘要
The response time of SiGe/Si modulation-doped multiple-quantum-well modulators is investigated. A refractive index variation is achieved by the depletion of the free carriers initially present in the wells. Both the tunneling and thermionic emissions are taken into account to study the time needed for the free carriers to escape from and to be captured into the wells. Results are presented for an optimized three-Si0.8Ge0.2-quantum-well (QW) (10-nm-thick) device. Such a QW structure can intrinsically reach an operation frequency around 13 GHz. (C) 2004 American Institute of Physics.
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页码:6109 / 6112
页数:4
相关论文
共 14 条
[1]   Electrooptic modulation of silicon-on-insulator submicrometer-size waveguide devices [J].
Barrios, CA ;
Almeida, VR ;
Panepucci, R ;
Lipson, M .
JOURNAL OF LIGHTWAVE TECHNOLOGY, 2003, 21 (10) :2332-2339
[2]   On the reduction of direct tunneling leakage through ultrathin gate oxides by a one-dimensional Schrodinger-Poisson solver [J].
Cassan, E .
JOURNAL OF APPLIED PHYSICS, 2000, 87 (11) :7931-7939
[3]   SiGe/Si multiquantum well structure for light modulation [J].
Cordat, A ;
Lardenois, S ;
Le Thanh, V ;
Koster, A .
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2002, 89 (1-3) :66-69
[4]  
*DESSIS, DESSIS SOFTW DESCR
[5]  
*FIMMWAVE, FIMMWAVE SOFTW DESCR
[6]   Band structure, deformation potentals, and carrier mobility in strained Si, Ge, and SiGe alloys [J].
Fischetti, MV ;
Laux, SE .
JOURNAL OF APPLIED PHYSICS, 1996, 80 (04) :2234-2252
[7]   Band offset predictions for strained group IV alloys:: Si1-x-yGexCy on Si(001) and Si1-xGex on Si1-zGez(001) [J].
Galdin, S ;
Dollfus, P ;
Aubry-Fortuna, V ;
Hesto, P ;
Osten, HJ .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2000, 15 (06) :565-572
[8]  
LANDAU LD, 1958, QUANTUM MECH, P174
[9]   A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor [J].
Liu, AS ;
Jones, R ;
Liao, L ;
Samara-Rubio, D ;
Rubin, D ;
Cohen, O ;
Nicolaescu, R ;
Paniccia, M .
NATURE, 2004, 427 (6975) :615-618
[10]   Design of a SiGe-Si quantum-well optical modulator [J].
Marris, D ;
Cordat, A ;
Pascal, D ;
Koster, A ;
Cassan, E ;
Vivien, L ;
Laval, S .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2003, 9 (03) :747-754