Field emission characteristics of defective diamond films

被引:17
作者
Park, KH
Lee, S [1 ]
Song, KH
Park, JI
Park, KJ
Han, SY
Na, SJ
Lee, NY
Koh, KH
机构
[1] Ajou Univ, Dept Phys, Suwon 442749, South Korea
[2] Natl Inst Technol & Qual, Dept Inorgan Chem, Kwachun 427010, South Korea
[3] Orion Elect Co, Informat Display Res Inst, Suwon 442749, South Korea
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1998年 / 16卷 / 02期
关键词
D O I
10.1116/1.589891
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have studied the field emission characteristics of defective diamond films grown by microwave plasma enhanced chemical vapor deposition. X-ray diffraction, Raman spectroscopy, scanning electron microscopy, atomic force microscopy, and the reflectance measurements have revealed the poor crystal quality and/or small grain sizes of the diamond phase and the inclusion of the non-diamond carbon phases in these films. The degrees of the film defectiveness have been found to depend on the methane concentration. Current-versus-voltage measurements have demonstrated that the defective diamond films have good electron emission characteristics, and, moreover, that the emission characteristics depend on the methane concentration. The observed correlation between the degrees of film defectiveness and the emission characteristics strongly suggests the defect-related electron-emission mechanism. In this study, the lower limits of the field emission current densities, estimated by averaging the total measured emission currents over the entire sample areas, of 1 mu A/cm(2) and 1 mA/cm(2) have been measured at electric fields as low as 4.5 and 7.6 V/mu m, respectively. We have also examined the reproducibility, the uniformity, and the stability of emission currents. (C) 1998 American Vacuum Society. [S0734-211X(98)08502-3].
引用
收藏
页码:724 / 728
页数:5
相关论文
共 14 条
[11]   COLD FIELD-EMISSION FROM CVD DIAMOND FILMS OBSERVED IN EMISSION ELECTRON-MICROSCOPY [J].
WANG, C ;
GARCIA, A ;
INGRAM, DC ;
LAKE, M ;
KORDESCH, ME .
ELECTRONICS LETTERS, 1991, 27 (16) :1459-1461
[12]   FIELD-DEPENDENCE OF THE AREA-DENSITY OF COLD ELECTRON-EMISSION SITES ON BROAD-AREA CVD DIAMOND FILMS [J].
XU, NS ;
LATHAM, RV ;
TZENG, Y .
ELECTRONICS LETTERS, 1993, 29 (18) :1596-1597
[13]   Electron field emission from chemical vapor deposited diamond [J].
Zhu, W ;
Kochanski, GP ;
Jin, S ;
Seibles, L .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (03) :2011-2019
[14]  
Zhu W, 1996, MATER RES SOC SYMP P, V416, P443