Mechanical strength assessment of very thin films for optical and electronic applications

被引:9
作者
Consiglio, R
Durand, N
Badawi, KF
Macquart, P
Lerbet, F
Assoul, M
von Stebut, J
机构
[1] Ecole Mines, Lab Sci & Genie Surfaces, INPL, URA CNRS 1402,Cooperat Program,GDR G1108, F-54042 Nancy, France
[2] URA CNRS 131, Met Phys Lab, F-86960 Futuroscope, France
[3] Ctr Rech Aubervilliers, F-93303 Aubervilliers, France
[4] GMP, IUT Dept, Equipe Mecan Contact, Lab Corros & Traitements Surfaces, F-25009 Besancon, France
关键词
microscratch; friction fatigue; Atomic Force Microscopy; adhesive failure; very thin films;
D O I
10.1016/S0257-8972(97)00136-9
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
A micro scratch device for testing very thin optical and electronic coatings is presented. Owing to a down-scaled diamond indenter tip radius (2 mu m) and appropriate load range, coating and interface specific strength data can be assessed. Two case studies are presented: the first on the influence of the interface quality of W coatings on silicon wafers as modified by ion-beam techniques (post-implantation and ion-beam assisted deposition); the second on the influence of substrate nature and surface cleaning of flat glass prior to deposition of a magnetron sputtered Ni-Cr PVD coating. (C) 1997 Elsevier Science S.A.
引用
收藏
页码:192 / 199
页数:8
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