学术探索
学术期刊
新闻热点
数据分析
智能评审

Status report: solar cell related research and development using amorphous and microcrystalline silicon deposited by HW(Cat)CVD

被引：28
作者：
Schroeder, B
机构：
[1] Univ Kaiserslautern, Dept Phys, D-67653 Kaiserslautern, Germany
[2] Univ Kaiserslautern, Ctr Mat Sci, D-67653 Kaiserslautern, Germany
来源：
THIN SOLID FILMS | 2003年 / 430卷 / 1-2期
关键词：
hot-wire CVD; amorphous silicon; microcrystalline silicon; solar cells;
D O I：
10.1016/S0040-6090(03)00070-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This article reviews the research and development of a-Si:H and muc-Si:H based solar cells by using hot wire chemical vapor deposition (HWCVD). The groups involved and the present status of conversion efficiencies attained are listed and will be discussed for different cell structures realized entirely or partly using this method. There are three main advantages of HWCVD: a quite simple set up, higher useable deposition rates and higher stability of HW-a-Si:H. It will be discussed how these advantages can be exploited to make HWCVD an alternative to plasma enhanced chemical vapor deposition. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：1 / 6
页数：6
相关论文
共 41 条
[21]   Growth of device quality p-type μc-Si:H films by hot-wire CVD for a-Si pin and c-Si heterojunction solar cells [J].
Mukherjee, C ;
Weber, U ;
Seitz, H ;
Schröder, B .
THIN SOLID FILMS, 2001, 395 (1-2) :310-314
[22]  
PAPADOPULOS P, 1993, J NON-CRYST SOLIDS, V164, P87, DOI 10.1016/0022-3093(93)90498-M
[23]   Optimization of process parameters in a large-area hot-wire CVD reactor for the deposition of amorphous silicon (a-Si:H) for solar cell application with highly uniform material quality [J].
Pflüger, A ;
Mukherjee, C ;
Schröder, B .
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2002, 73 (03) :321-337
[24]   Current status of the thermo-catalytic (hot-wire) CVD of thin silicon films for photovoltaic applications [J].
Schroeder, B ;
Weber, U ;
Seitz, H ;
Ledermann, A ;
Mukherjee, C .
THIN SOLID FILMS, 2001, 395 (1-2) :298-304
[25]  
SCHROEDER B, 2001, P 27 EUR PVEC MUN, P2850
[26]   Advances in solar cells made with hot wire chemical vapor deposition (HWCVD): superior films and devices at low equipment cost [J].
Schropp, REI .
THIN SOLID FILMS, 2002, 403 :17-25
[27]  
SCHROPP REI, 2002, MRS S P, V712
[28]  
SEITZ H, 2000, P 16 EC PHOT SOL EN, P450
[29]   a-Si:H/poly-Si tandem cells deposited by hot-wire CVD [J].
van Veen, MK ;
van Veenendaal, PATT ;
van der Werf, CHM ;
Rath, JK ;
Schropp, REI .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 2002, 299 :1194-1197
[30]  
VANECEK M, 1992, P 11 ECPVSEC, P96
12345