Optical and electrical properties of aluminum oxide films deposited by spray pyrolysis

被引:94
作者
Aguilar-Frutis, M
Garcia, M
Falcony, C
机构
[1] Inst Politecn Nacl, CINVESTAV, Dept Phys, Mexico City 07000, DF, Mexico
[2] Natl Autonomous Univ Mexico, Inst Invest Mat, Mexico City 04510, DF, Mexico
[3] Inst Politecn Nacl, PMCATA, Mexico City 07000, DF, Mexico
关键词
D O I
10.1063/1.121156
中图分类号
O59 [应用物理学];
学科分类号
摘要
The optical and electrical characteristics of spray pyrolysis deposited aluminum oxide films are reported. The films were deposited from a spraying solution of aluminum acetylacetonate in N,N-dimethylformamide using an ultrasonic mist generator on (100) Si substrates. The addition of water mist during the spraying deposition process resulted in an overall improvement of the films characteristics. The substrate temperature during deposition was in 450-650 degrees C range. Deposition rates up to 90 Angstrom/s were obtained depending on the spraying solution concentration and substrate temperature with an activation energy of the order of 31 kJ/mol, The optical energy band gap for these films was 5.63 eV and the refractive index at 630 nm up to 1.66 was measured by ellipsometry, The electrical characteristics of the films were determined from the capacitance and current versus voltage measurements of metal-oxide-semiconductor (MOS) structures incorporating them. A dielectric constant of 7.9, interface states density of the order of 10(11) X 1/eV cm(2) as well as breakdown fields higher than 5 MV/cm were determined in this way. (C) 1998 American Institute of Physics. [S0003-6951(98)03514-1].
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页码:1700 / 1702
页数:3
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