Materials requirements and fabrication of active matrix arrays of organic thin-film transistors for displays

被引:166
作者
Chabinyc, ML [1 ]
Salleo, A [1 ]
机构
[1] Palo Alto Res Ctr, Palo Alto, CA 94304 USA
关键词
D O I
10.1021/cm049647z
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
An overview of the materials requirements and the fabrication processes for the use of organic thin-film transistors in active-matrix backplanes for displays is presented. A summary of current knowledge of the electrical performance of both molecular and polymeric semiconductors is discussed with emphasis on the performance requirements needed for displays. Patterning and deposition processes for conductors, dielectrics, and organic semiconductors that have been used to fabricate organic thin-film transistors are reviewed. Examples of backplanes fabricated with these processes are given, and directions for the future research are outlined.
引用
收藏
页码:4509 / 4521
页数:13
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