Comparative measurements of the piezoelectric coefficient of a lead zirconate titanate film by piezoresponse force microscopy using electrically characterized tips

被引：22

作者：

Lin, HN ^{[1
]}

Chen, SH

Ho, ST

Chen, PR

Lin, IN

机构：

[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan

[2] Mingchi Inst Technol, Dept Mat Engn, Taipei 243, Taiwan

[3] Natl Tsing Hua Univ, Ctr Mat Sci, Hsinchu 300, Taiwan

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2003年 / 21卷 / 02期

关键词：

D O I：

10.1116/1.1562644

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report comparative measurements of the piezoelectric coefficient d(33) of a lead zirconate titanate (PZT) film by piezoresponse force microscopy based on tip/PZT/electrode and tip/electrode/PZT/ electrode configurations. With the use of electrically characterized Au-coated tips, the obtained values are in good agreement and indicate a negligible methodological effect. It is concluded that the d(33),can be reasonably determined without the use of a top electrode as long as the electrical quality of the tip is qualified. (C) 2003 American Vacuum Society. [DOI: 10.1116/1.1562644].

引用

页码：916 / 918

页数：3

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