Planar interdigitated electrolyte-conductivity sensors on an insulating substrate covered with Ta2O5

被引：30

作者：

Olthuis, W

Sprenkels, AJ

Bomer, JG

Bergveld, P

机构：

[1] Univ Twente, MESA Res Inst, NL-7500 AE Enschede, Netherlands

[2] SC, NL-8243 BV Lelystad, Netherlands

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1997年 / 43卷 / 1-3期

关键词：

electrolyte-conductivity sensors; electrode-substrate structure; Ta2O5;

D O I：

10.1016/S0925-4005(97)00157-3

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Interdigitated electrolyte-conductivity sensors with an added top layer of insulating Ta2O5 have been realized. The electrode-substrate structure under the Ta2O5 film has been planarized in order to obtain a totally flat top surface. In addition, the electrodes have been applied on a totally insulating substrate, thus reducing the parasitic sensor capacitance by a factor of ten. (C) 1997 Elsevier Science S.A.

引用

页码：211 / 216

页数：6

共 4 条

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