Laser technologies for manufacturing of advanced materials and devices

被引:2
作者
Dubowski, JJ [1 ]
机构
[1] Natl Res Council Canada, Inst Microstruct Sci, Ottawa, ON K1A 0R6, Canada
来源
LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING V | 2000年 / 3933卷
关键词
laser microstructuring; laser etching; laser ablation; laser annealing; quantum well intermixing; photonic integrated devices;
D O I
10.1117/12.387595
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
As demand is growing for devices capable of performing new and increased numbers of operations within an ever shrinking physical volume the laser has become an increasingly important tool helping to overcome the limitations of conventional microfabrication technologies. In addition to "classical" applications of lasers such as via hole drilling, trimming or pulsed laser deposition of thin films, there have been new developments of laser-based technologies for the fabrication of advanced micro- and nano-devices. Of particular interest for optoelectronic and photonic applications is the potential of the laser for the fabrication of integrated and monolithically integrated photonic devices and circuits.
引用
收藏
页码:58 / 61
页数:4
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