Method of distinguishing SrBi2Ta2O9 phase from fluorite phase using X-ray diffraction reciprocal space mapping

被引:58
作者
Saito, K
Mitsuya, M
Nukaga, N
Yamaji, I
Akai, T
Funakubo, H
机构
[1] Philips Analyt Applicat Lab Japan, Sagamihara, Kanagawa 2280803, Japan
[2] Tokyo Inst Technol, Interdisciplinary Grad Sch, Dept Innovat & Engineered Mat, Midori Ku, Yokohama, Kanagawa 2268502, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2000年 / 39卷 / 9B期
关键词
SrBi2Ta2O9 (SBT); SrBi2(Ta1-xNbx)O-9 (SBTN); fluorite; pyrochlore; impurity phase; phase identification; X-ray diffraction (XRD); reciprocal space mapping; MOCVD;
D O I
10.1143/JJAP.39.5489
中图分类号
O59 [应用物理学];
学科分类号
摘要
In the Sr-Bi-Ta-Nb-O system, three crystallographic phases are known to exist: the SrBi2(Ta1-xNbx)O-9 (SBTN) perovskite, fluorite and pyrochlore phases. It is considered that the fluorite phase is a low-temperature phase of SET, which tends to grow in excess bismuth compositions, and the pyrochlore phase tends to grow in bismuth-deficient compositions. In conventional X-ray diffraction (XRD) characterization, the SBTN phase shows strong (115) diffraction around 29 [2 theta deg]. Unfortunately, however, the other two phases also show their (111) and (222) diffractions near the same angle when the film is prepared on a platinum-coated silicon substrate. Therefore, the phase identification of the SBTN phase from the other two phases is almost impossible by the conventional technique. We employed XRD reciprocal space mapping to distinguish these phases in the present study. The three crystallographic phases were identified and distinguished from each other. It is ascertained that this technique is effective to identify crystallographic phases especially in the case in which more than two phases show similar diffraction angles.
引用
收藏
页码:5489 / 5495
页数:7
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