Sub-diffraction limited structuring of solid targets with femtosecond laser pulses

被引：115

作者：

Korte, F

Adams, S

Egbert, A

Fallnich, C

Ostendorf, A

Nolte, S

Will, M

Ruske, JP

Chichkov, BN

Tünnermann, A

机构：

[1] Laser Zentrum Hannover eV, D-30419 Hannover, Germany

[2] Univ Jena, Inst Appl Phys, D-07743 Jena, Germany

来源：

OPTICS EXPRESS | 2000年 / 7卷 / 02期

关键词：

D O I：

10.1364/OE.7.000041

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Possibilities to produce sub-diffraction limited structures in thin metal lms and bulk dielectric materials using femtosecond laser pulses are investigated. The physics of ultrashort pulse laser ablation of solids is outlined. Results on the fabrication of sub-micrometer structures in 100-200 nm chrome-coated surfaces by direct ablative writing are reported. Polarization maintaining optical waveguides produced by femtosecond laser pulses inside crystalline quartz are demonstrated. (C) 2000 Optical Society of America.

引用

页码：41 / 49

页数：9

共 14 条

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