A review on fabrication technologies for the monolithic integration of tapers with III-V semiconductor devices

被引：154

作者：

Moerman, I ^{[1
]}

Van Daele, PP ^{[1
]}

Demeester, PM ^{[1
]}

机构：

[1] State Univ Ghent, IMEC, Dept Informat Technol, B-9000 Ghent, Belgium

来源：

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS | 1997年 / 3卷 / 06期

关键词：

mode-size converters; monolithic integration; optoelectronic integrated circuits; III-V semiconductors;

D O I：

10.1109/2944.658785

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The past few years a lot of effort has been put in the development and fabrication of III-V semiconductor waveguiding devices with monolithic integrated mode size converters (tapers), By integrating a taper with a waveguide device, the coupling losses and the packaging cost of OEIC's in future fiber-optical networks can be much reduced, This paper gives an overview of different taper designs, the possible fabrication technologies and performances of tapered devices.

引用

页码：1308 / 1320

页数：13

共 81 条

[1] Wide-temperature-range operation of 1.3-mu m beam expander-integrated laser diodes grown by in-plane thickness control MOVPE using a silicon shadow mask
Aoki, M
Komori, M
Suzuki, M
Sato, H
Takahashi, M
Ohtoshi, T
Uomi, K
Tsuji, S
[J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 1996, 8 (04) : 479 - 481
[2] BAUER JG, P 19 EUR C OPT COMM, P277
[3] INP-BASED MULTIPLE-QUANTUM-WELL LASERS WITH AN INTEGRATED TAPERED BEAM EXPANDER WAVE-GUIDE
BENMICHAEL, R
KOREN, U
MILLER, BI
YOUNG, MG
CHIEN, M
RAYBON, G
[J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 1994, 6 (12) : 1412 - 1414
[4] REDUCED-CONFINEMENT ANTENNAS FOR GAALAS INTEGRATED OPTICAL WAVE-GUIDES
BOSSI, DE
GOODHUE, WD
FINN, MC
RAUSCHENBACH, K
BALES, JW
REDIKER, RH
[J]. APPLIED PHYSICS LETTERS, 1990, 56 (05) : 420 - 422
[5] REDUCED-CONFINEMENT GAALAS TAPERED WAVE-GUIDE ANTENNAS FOR ENHANCED FAR-FIELD BEAM DIRECTIONALITY
BOSSI, DE
GOODHUE, WD
JOHNSON, LM
REDIKER, RH
[J]. IEEE JOURNAL OF QUANTUM ELECTRONICS, 1991, 27 (03) : 687 - 695
[6] 1.3 mu m InGaP/InAsP MQW lasers with large spot-size and low loss fibre chip coupling fabricated by a standard buried heterostructure process
Bouadma, N
Ougazzaden, A
Kamoun, M
Kazmierski, C
Silvestre, L
[J]. ELECTRONICS LETTERS, 1996, 32 (17) : 1582 - 1583
[7] VERTICAL INP/INGAASP TAPERS FOR LOW-LOSS OPTICAL FIBER-WAVE-GUIDE COUPLING
BRENNER, T
HUNZIKER, W
SMIT, M
BACHMANN, M
GUEKOS, G
MELCHIOR, H
[J]. ELECTRONICS LETTERS, 1992, 28 (22) : 2040 - 2041
[8] VERTICALLY TAPERED INGAASP/INP WAVE-GUIDES FOR HIGHLY EFFICIENT COUPLING TO FLAT-END SINGLE-MODE FIBERS
BRENNER, T
BACHMANN, M
MELCHIOR, H
[J]. APPLIED PHYSICS LETTERS, 1994, 65 (07) : 798 - 800
[9] INTEGRATED OPTICAL MODESHAPE ADAPTERS IN INGAASP/INP FOR EFFICIENT FIBER-TO-WAVE-GUIDE COUPLING
BRENNER, T
MELCHIOR, H
[J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 1993, 5 (09) : 1053 - 1056
[10] COMPACT INGAASP/INP LASER-DIODES WITH INTEGRATED-MODE EXPANDER FOR EFFICIENT COUPLING TO FLAT-ENDED SINGLEMODE FIBERS
BRENNER, T
HESS, R
MELCHIOR, H
[J]. ELECTRONICS LETTERS, 1995, 31 (17) : 1443 - 1445

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