VERTICALLY TAPERED INGAASP/INP WAVE-GUIDES FOR HIGHLY EFFICIENT COUPLING TO FLAT-END SINGLE-MODE FIBERS

被引：16

作者：

BRENNER, T

BACHMANN, M

MELCHIOR, H

机构：

[1] Swiss Federal Institute of Technology

来源：

APPLIED PHYSICS LETTERS | 1994年 / 65卷 / 07期

关键词：

D O I：

10.1063/1.112233

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report on InGaAsP/InP optical waveguide tapers for efficient coupling to flat-end single-mode fibers. These integrated tapers are realized by an optoelectronic integrated circuit compatible diffusion limited etch process for the vertically tapered core layer and a selective area regrowth for the upper cladding. The smoothly etched vertical tapers and the excellent quality of the regrown layers show low scattering and radiation losses. Polarization insensitive fiber to waveguide coupling losses are below 1 dB and relaxed alignment tolerances are +/- 2.5 mum in the horizontal and vertical, and 28 mum in longitudinal directions for 1 dB in addition.

引用

页码：798 / 800

页数：3

共 8 条

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