Ellipsometric parameters and reflectances of thin films with slightly rough boundaries

被引：72

作者：

Franta, D ^{[1
]}

Ohlidal, I ^{[1
]}

机构：

[1] Masaryk Univ, Fac Sci, Dept Solid State Phys, CS-61137 Brno, Czech Republic

来源：

JOURNAL OF MODERN OPTICS | 1998年 / 45卷 / 05期

关键词：

D O I：

10.1080/09500349808230887

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In this theoretical paper, formulae for important optical quantities of single layers with slightly randomly rough boundaries are derived by means of a generalized Rayleigh-Rice theory. Thus the formulae for the specular reflectances and ellipsometric parameters of the layers mentioned are presented. The theoretical results are illustrated by a numerical analysis. Practical features implied by this analysis to be relevant from the experimental point of view are introduced as well. Moreover, relations expressing the flux of scattered light are presented.

引用

页码：903 / 934

页数：32

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