Pixelated phase-mask dynamic interferometer

被引：298

作者：

Millerd, J ^{[1
]}

Brock, N ^{[1
]}

Hayes, J ^{[1
]}

North-Morris, M ^{[1
]}

Novak, M ^{[1
]}

Wyant, J ^{[1
]}

机构：

[1] 4D Technol Corp, Tucson, AZ 85706 USA

来源：

INTERFEROMETRY XII: TECHNIQUES AND ANALYSIS | 2004年 / 5531卷

关键词：

D O I：

10.1117/12.560807

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We demonstrate a new type of spatial phase-shifting, dynamic interferometer that can acquire phase-shifted interferograms in a single camera frame. The interferometer is constructed with a pixelated phase-mask aligned to a detector array. The phase-mask encodes a high-frequency spatial interference pattern on two collinear and orthogonally polarized reference and test beams. The phase-difference between the two beams can be calculated using conventional N-bucket algorithms or by spatial convolution. The wide spectral response of the mask and true common-path design permits operation with a wide variety of interferometer front ends, and with virtually any light source including white-light.

引用

页码：304 / 314

页数：11

共 21 条

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