Ferroelectric nanostructures sputtered on alumina membranes

被引:10
作者
Mishina, ED
Stadnichuk, VI
Sigov, AS
Golovko, YI
Mukhorotov, VM
Nakabayashi, S
Masuda, H
Hashizume, D
Nakao, A
机构
[1] Moscow State Inst Radioengn Elect & Automat, Moscow 117454, Russia
[2] Russian Acad Sci, Inst Gen Phys, Moscow, Russia
[3] Saitama Univ, Fac Sci, Dept Chem, Urawa, Saitama 3388570, Japan
[4] Tokyo Metropolitan Univ, Dept Appl Chem, Hachioji, Tokyo 1920397, Japan
[5] Inst Phys & Chem Res, Mol Characterizat Team, Wako, Saitama 3510918, Japan
基金
俄罗斯基础研究基金会; 日本学术振兴会;
关键词
nanostructures; ferroelectrics; porous membranes;
D O I
10.1016/j.physe.2004.05.008
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Ba0.85Sr0.15TiO3 (BST) nanostructures are fabricated by RF-sputtering on porous alumina membranes. Sputtered material does not penetrate into pores with the average size in the range of 40-200 nm, but forms the nanostructure on top. Nanostructure consists of nanoparticles with the size dependent on the amount of sputtered material. Effect of self-assembling of nanoparticles is observed for the membrane with ordered nanopores of 50 nm. Using the ordered alumina membrane as a template for self-assembling the ferroelectric particles opens new possibilities to a cheap and effective fabrication of nanoscale ferroelectric devices and their arrays. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:35 / 41
页数:7
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