Diamond-like carbon layer formation on graphite by excimer laser irradiation

被引：11

作者：

Mechler, A

Heszler, P

Kantor, Z

Szorenyi, T

Bor, Z

机构：

[1] Hungarian Acad Sci, Res Grp Laser Phys, H-6720 Szeged, Hungary

[2] JATE Univ, Dept Opt & Quantum Elect, H-6720 Szeged, Hungary

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1998年 / 66卷 / 06期

关键词：

D O I：

10.1007/s003390050729

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Irradiation of highly oriented pyrolytic graphite (HOPG) with ArF excimer laser (lambda = 193 nm) pulses of 2 J/cm(2) fluence results in the formation of a thin hydrogen-free diamond-like carbon (DLC) film on the surface. The density of the laser-formed DLC layer is approximately 2.8 g/cm(3), as calculated from area-selective Raman spectroscopy and atomic force microscopic (AFM) measurements. The proportion of the sp(3) hybrid states of carbon is estimated to be approximately 50%. Annealing in air at 650 degrees C for 30 min recovers the graphite structure.

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收藏

页码：659 / 661

页数：3

相关论文

共 24 条

[1] LOW-PRESSURE, METASTABLE GROWTH OF DIAMOND AND DIAMONDLIKE PHASES [J].

ANGUS, JC ;

HAYMAN, CC .

SCIENCE, 1988, 241 (4868) :913-921

[2] CHARACTERIZATION OF DIAMOND-LIKE FILMS PREPARED BY LASER ABLATION OF GRAPHITE [J].

BOURDON, EBD ;

DULEY, WW ;

JONES, AP ;

PRINCE, RH .

SURFACE & COATINGS TECHNOLOGY, 1991, 47 (1-3) :509-516

[3]

Chrisey D. B., 1994, PULSED LASER DEPOSIT

[4] PREPARATION AND STUDY OF LASER PLASMA DIAMOND [J].

COLLINS, CB ;

DAVANLOO, F ;

JUENGERMAN, EM ;

JANDER, DR ;

LEE, TJ .

SURFACE & COATINGS TECHNOLOGY, 1991, 47 (1-3) :244-251

[5] VAPOR-DEPOSITION PROCESSES FOR AMORPHOUS-CARBON FILMS WITH SP3 FRACTIONS APPROACHING DIAMOND [J].

CUOMO, JJ ;

PAPPAS, DL ;

BRULEY, J ;

DOYLE, JP ;

SAENGER, KL .

JOURNAL OF APPLIED PHYSICS, 1991, 70 (03) :1706-1711

[6] MECHANICAL AND THERMOPHYSICAL PROPERTIES OF DIAMOND-LIKE CARBON (DLC) FILMS WITH DIFFERENT SP(3)/SP(2) RATIOS [J].

DEMICHELIS, F ;

PIRRI, CF ;

TAGLIAFERRO, A ;

BENEDETTO, G ;

BOARINO, L ;

SPAGNOLO, R ;

DUNLOP, E ;

HAUPT, J ;

GISSLER, W .

DIAMOND AND RELATED MATERIALS, 1993, 2 (5-7) :890-892

[7] INVESTIGATION OF HYDROCARBON-PLASMA-GENERATED CARBON-FILMS BY ELECTRON-ENERGY-LOSS SPECTROSCOPY [J].

FINK, J ;

MULLERHEINZERLING, T ;

PFLUGER, J ;

SCHEERER, B ;

DISCHLER, B ;

KOIDL, P ;

BUBENZER, A ;

SAH, RE .

PHYSICAL REVIEW B, 1984, 30 (08) :4713-4718

[8]

GOGOLL S, 1996, APPL SURF SCI, V96, P708

[9] INTERACTIONS OF LOW-ENERGY REACTIVE IONS WITH SURFACES .4. CHEMICALLY BONDED DIAMOND-LIKE FILMS FROM ION-BEAM DEPOSITION [J].

KASI, SR ;

KANG, H ;

RABALAIS, JW .

JOURNAL OF CHEMICAL PHYSICS, 1988, 88 (09) :5914-5924

[10] CHARACTERIZATION OF DIAMOND FILMS BY RAMAN-SPECTROSCOPY [J].

KNIGHT, DS ;

WHITE, WB .

JOURNAL OF MATERIALS RESEARCH, 1989, 4 (02) :385-393