Complementary in-situ and post-deposition diagnostics of thin film semiconductor structures

被引：18

作者：

Pickering, C ^{[1
]}

机构：

[1] Def Res Agcy, Elect Sector, Malvern WR14 3PS, Worcs, England

来源：

THIN SOLID FILMS | 1998年 / 313卷

关键词：

ellipsometry; scattering; real-time; control; Si; SiGe;

D O I：

10.1016/S0040-6090(97)00855-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In-situ and in-line monitoring techniques based on spectroscopic ellipsometry and laser light scattering have been used for process definition and to provide insights into process science in the strained SiGe/Si system. The development of the techniques for real-time closed loop control of alloy composition and growth rate are discussed with emphasis on the requirements for rapid data analysis. Crown Copyright (C) 1998 Published by Elsevier Science S.A.

引用

页码：406 / 415

页数：10

共 14 条

[1] BOUNDS ON ALLOWED VALUES OF THE EFFECTIVE DIELECTRIC FUNCTION OF 2-COMPONENT COMPOSITES AT FINITE FREQUENCIES [J].

ASPNES, DE .

PHYSICAL REVIEW B, 1982, 25 (02) :1358-1361

[2] SURFACE TRANSITION REGIONS AND VISIBLE-NEAR UV OPTICAL-PROPERTIES OF SOME SEMICONDUCTORS [J].

ASPNES, DE .

PHYSICA B & C, 1983, 117 (MAR) :359-361

[3] MINIMAL-DATA APPROACHES FOR DETERMINING OUTER-LAYER DIELECTRIC RESPONSES OF FILMS FROM KINETIC REFLECTOMETRIC AND ELLIPSOMETRIC MEASUREMENTS [J].

ASPNES, DE .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1993, 10 (05) :974-983

[4]

CARLINE RT, 1998, THIN SOLID FILMS, V313

[5]

CARLINE RT, 1997, IN PRESS P SPIE, V3007

[6]

MARRS AD, 1997, 5 INT C ART NEUR NET

[7] SPECTROSCOPIC ELLIPSOMETRY OF EPITAXIAL SI (100) SURFACES [J].

NAYAR, V ;

LEONG, WY ;

PICKERING, C ;

PIDDUCK, AJ ;

CARLINE, RT ;

ROBBINS, DJ .

APPLIED PHYSICS LETTERS, 1992, 61 (11) :1304-1306

[8] DIELECTRIC FUNCTION SPECTRA OF STAINED AND RELAXED SI(1-X)GE(X) ALLOYS (X=0-0.25) [J].

PICKERING, C ;

CARLINE, RT .

JOURNAL OF APPLIED PHYSICS, 1994, 75 (09) :4642-4647

[9] REAL-TIME SPECTROSCOPIC ELLIPSOMETRY MONITORING OF SI1-XGEX/SI EPITAXIAL-GROWTH [J].

PICKERING, C ;

HOPE, DAO ;

CARLINE, RT ;

ROBBINS, DJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (03) :740-744

[10] Real-time monitoring of Si1-xGex heteroepitaxial growth using laser light scattering and spectroscopic ellipsometry [J].

Pickering, C ;

Carline, RT ;

Hope, DAO ;

Robbins, DJ .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1995, 152 (01) :95-102

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