REAL-TIME SPECTROSCOPIC ELLIPSOMETRY MONITORING OF SI1-XGEX/SI EPITAXIAL-GROWTH

被引：16

作者：

PICKERING, C

HOPE, DAO

CARLINE, RT

ROBBINS, DJ

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1995年 / 13卷 / 03期

关键词：

D O I：

10.1116/1.579818

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：740 / 744

页数：5

共 12 条

[1] OPTICAL CONTROL OF GROWTH OF ALXGA1-XAS BY ORGANOMETALLIC MOLECULAR-BEAM EPITAXY [J].

ASPNES, DE ;

QUINN, WE ;

GREGORY, S .

APPLIED PHYSICS LETTERS, 1990, 57 (25) :2707-2709

[2] SPECTROSCOPIC ELLIPSOMETRY OF SI1-XGEX EPILAYERS OF ARBITRARY COMPOSITION 0-LESS-THAN-OR-EQUAL-TO-X-LESS-THAN-OR-EQUAL-TO-0.255 [J].

CARLINE, RT ;

PICKERING, C ;

ROBBINS, DJ ;

LEONG, WY ;

PITT, AD ;

CULLIS, AG .

APPLIED PHYSICS LETTERS, 1994, 64 (09) :1114-1116

[3] REAL-TIME MONITORING AND CONTROL DURING MOVPE GROWTH OF CDTE USING MULTIWAVELENGTH ELLIPSOMETRY [J].

JOHS, B ;

DOERR, D ;

PITTAL, S ;

BHAT, IB ;

DAKSHINAMURTHY, S .

THIN SOLID FILMS, 1993, 233 (1-2) :293-296

[4] DIELECTRIC FUNCTION SPECTRA OF STAINED AND RELAXED SI(1-X)GE(X) ALLOYS (X=0-0.25) [J].

PICKERING, C ;

CARLINE, RT .

JOURNAL OF APPLIED PHYSICS, 1994, 75 (09) :4642-4647

[5]

PICKERING C, 1994, MATER RES SOC SYMP P, V324, P53

[6] NONDESTRUCTIVE CHARACTERIZATION OF SEMICONDUCTOR MULTILAYERS [J].

PICKERING, C .

JOM-JOURNAL OF THE MINERALS METALS & MATERIALS SOCIETY, 1994, 46 (09) :60-64

[7] IN-SITU DUAL-WAVELENGTH AND EX-SITU SPECTROSCOPIC ELLIPSOMETRY STUDIES OF STRAINED SIGE EPITAXIAL LAYERS AND MULTIQUANTUM-WELL STRUCTURES [J].

PICKERING, C ;

CARLINE, RT ;

ROBBINS, DJ ;

LEONG, WY ;

GRAY, DE ;

GREEF, R .

THIN SOLID FILMS, 1993, 233 (1-2) :126-130

[8]

PICKERING C, 1994, HDB CRYSTAL GROWTH, V3, P817

[9] THE FASTEST REAL-TIME SPECTROSCOPIC ELLIPSOMETRY - APPLICATIONS AND LIMITATIONS FOR IN-SITU AND QUALITY-CONTROL [J].

PIEL, JP ;

STEHLE, JL ;

THOMAS, O .

THIN SOLID FILMS, 1993, 233 (1-2) :301-306

[10] A MODEL FOR HETEROGENEOUS GROWTH OF SI1-XGEX FILMS FROM HYDRIDES [J].

ROBBINS, DJ ;

GLASPER, JL ;

CULLIS, AG ;

LEONG, WY .

JOURNAL OF APPLIED PHYSICS, 1991, 69 (06) :3729-3732

← 1 2 →