OPTICAL CONTROL OF GROWTH OF ALXGA1-XAS BY ORGANOMETALLIC MOLECULAR-BEAM EPITAXY

Using spectroellipsometry, we obtain information on the near-surface composition x of epitaxial AlxGa1-xAs layers during crystal growth by organometallic molecular beam epitaxy and use this information to regulate the flow of triethylaluminum to the growth surface. The resulting closed-loop control system maintains the imaginary part of the dielectric response of thick AlxGa1-xAs films constant to an equivalent compositional precision better than ±0.001 over extended periods of time.