Hydrogen-sensitive GaN Schottky diodes

被引:54
作者
Kim, J
Gila, BP
Chung, GY
Abernathy, CR
Pearton, SJ
Ren, F
机构
[1] Univ Florida, Dept Chem Engn, Gainesville, FL 32611 USA
[2] Univ Florida, Dept Mat Sci & Engn, Gainesville, FL 32611 USA
[3] Sterling Semicond, Tampa, FL 33619 USA
基金
美国国家航空航天局; 美国国家科学基金会;
关键词
gas-sensors; Schottky; diodes; GaN;
D O I
10.1016/S0038-1101(02)00485-9
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Pt/n-GaN and Pd/n-GaN Schottky diodes were characterized for their response to hydrogen as a function of measurement temperature. Even at modest temperatures (80-140 degreesC), an 80 mum diameter diode shows a large increase ( greater than or equal to 0.5 mA) in forward current upon introduction of similar to10% H-2 into a N-2 ambient. The change in current increases with measurement temperature and begins essentially immediately upon introduction of the hydrogen. Cycling the ambient from N-2 to 10% H-2 in N-2 and back to N-2 produces reproducible cycling of the forward current at fixed forward bias. The decrease in barrier height of Pt on GaN was 50 mV at 25 degreesC and 70 mV at 150 degreesC upon introduction of H-2 into the ambient, with lower values for Pd. At high temperature, the time response of the sensors appears to be controlled by hydrogen diffusion to the metal/GaN interface, while at low temperatures (<100°C), dissociation of the gas appears to be the rate-determining step. (C) 2003 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:1069 / 1073
页数:5
相关论文
共 26 条
[1]   Comparison of interfacial and electronic properties of annealed Pd/SiC and Pd/SiO2/SiC Schottky diode sensors [J].
Chen, LY ;
Hunter, GW ;
Neudeck, PG ;
Bansal, G ;
Petit, JB ;
Knight, D .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1997, 15 (03) :1228-1234
[2]   Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications [J].
Connolly, EJ ;
O'Halloran, GM ;
Pham, HTM ;
Sarro, PM ;
French, PJ .
SENSORS AND ACTUATORS A-PHYSICAL, 2002, 99 (1-2) :25-30
[3]  
HUNTER GW, 2001, MEMS HDB
[4]  
HUNTER GW, 2002, P ECS, V1, P212
[5]   HYDROGEN-SENSITIVE SCHOTTKY-BARRIER DIODES [J].
ITO, K .
SURFACE SCIENCE, 1979, 86 (JUL) :345-352
[6]  
KIM JW, IN PRESS J ELECT MAT
[7]   HYDROGEN-SENSITIVE MOS FIELD-EFFECT TRANSISTOR [J].
LUNDSTROEM, I ;
SHIVARAMAN, S ;
SVENSSON, C ;
LUNDKVIST, L .
APPLIED PHYSICS LETTERS, 1975, 26 (02) :55-57
[8]   HYDROGEN IN SMOKE DETECTED BY PD-GATE FIELD-EFFECT TRANSISTOR [J].
LUNDSTROM, I ;
SHIVARAMAN, MS ;
STIBLERT, L ;
SVENSSON, C .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1976, 47 (06) :738-740
[9]   HYDROGEN-SENSITIVE PD-GATE MOS-TRANSISTOR [J].
LUNDSTROM, KI ;
SHIVARAMAN, MS ;
SVENSSON, CM .
JOURNAL OF APPLIED PHYSICS, 1975, 46 (09) :3876-3881
[10]   High temperature Pt Schottky diode gas sensors on n-type GaN [J].
Luther, BP ;
Wolter, SD ;
Mohney, SE .
SENSORS AND ACTUATORS B-CHEMICAL, 1999, 56 (1-2) :164-168