Electron emitters synthesized by selected area deposition of carbon nanotubes on silicon substrates

被引:12
作者
Huang, JH [1 ]
Chen, SP
Chuang, CC
Lin, IN
Tsai, CH
机构
[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan
[2] Natl Tsing Hua Univ, Ctr Mat Sci, Hsinchu 300, Taiwan
[3] Natl Tsing Hua Univ, Dept Engn & Syst Sci, Hsinchu 300, Taiwan
关键词
nanotubes; chemical vapor deposition; display; field emission;
D O I
10.1016/S0925-9635(02)00369-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We have successfully attained patterned carbon nanotubes grown on two-dimensional Ni arrays of square blocks of various sizes on Si by a microwave-heated chemical vapor deposition process. The Ni blocks are either freestanding or isolated by the silicon dioxide. For patterned carbon nanotube emitters, grown on freestanding Ni blocks, the emission current-density increases with the size of the Ni blocks. To the contrary, patterned carbon nanotube emitters grown on 2 mum by 2 mum Ni blocks isolated by the silicon diode have exhibited an emission behavior as excellent as the un-patterned emitters; both emitters have very low turn-on and threshold fields being at similar to0.1 V/mum and similar to1.50 V/mum, respectively and can emit current density exceeding 120 mA/cm(2). (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:481 / 485
页数:5
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