Electrical and optical properties of In2O3-ZnO films deposited on polyethylene terephthahate substrates by radio frequency magnetron sputtering

被引:57
作者
Kim, HM [1 ]
Jung, SK
Ahn, JS
Kang, YJ
Je, KC
机构
[1] Catholic Univ Daegu, Dept Phys & Semicond Sci, Hayang 712702, Kyeongbuk, South Korea
[2] JAIST, Sch Mat Sci, Tatsunokuchi, Ishikawa 9231292, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2003年 / 42卷 / 01期
关键词
TCO; IZO and ITO films; rf-magnetron sputtering; PET substrate; the AFM images; surface uniformity;
D O I
10.1143/JJAP.42.223
中图分类号
O59 [应用物理学];
学科分类号
摘要
Using a In2O3 and ZnO powder mixture with a ratio of 95 : 5 in wt% as a target, highly transparent conducting oxide (TCO) films are prepared on polyethylene terephthalate (PET) substrates by rf-magnetron sputtering. These films have amorphous structures with excellent electrical stability, surface uniformity and adhesion to the PET substrate and can be prepared at room temperature. In particular, In2O3-ZnO (IZO) films directly deposited on PET without a hard-coated layer have nearly similar electrical properties, higher transmittance and a more uniform surface in comparison with those deposited on a hard-coated layer of PET. When a TCO material is deposited on PET, IZO is more suitable than indium tin oxide (ITO) in several aspects such as the optical, electrical, and etching properties and its surface uniformity.
引用
收藏
页码:223 / 227
页数:5
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