Sub-micrometer thermal physics - An overview on SThM techniques

被引：50

作者：

Gmelin, E ^{[1
]}

Fischer, R ^{[1
]}

Stitzinger, R ^{[1
]}

机构：

[1] Max Planck Inst Festkorperforsch, D-70569 Stuttgart, Germany

来源：

THERMOCHIMICA ACTA | 1998年 / 310卷 / 1-2期

关键词：

thermal instruments; scanning probe microscopy; components and technique; thermometry; 7.20-n; 7.79-v; 7.20.DT;

D O I：

10.1016/S0040-6031(97)00379-1

中图分类号：

O414.1 [热力学];

学科分类号：

摘要：

The historical development and present state of the art of scanning thermal microscopy (SThM) - temperature profiling, thermography and other measurements of thermal parameters - in the sub-mu m range and the relevant thermal sensors are reviewed. The paper proposes a classification scheme for the various experimental arrangements of STM and AFM based SThM's. Limitations of the SThM technique and future prospects are briefly discussed. (C) 1998 Elsevier Science B.V.

引用

页码：1 / 17

页数：17

共 79 条

[1]

[Anonymous], PROGR PHOTOTHERMAL P

[2] PHOTOTHERMAL SPECTROSCOPY WITH FEMTOJOULE SENSITIVITY USING A MICROMECHANICAL DEVICE [J].

BARNES, JR ;

STEPHENSON, RJ ;

WELLAND, ME ;

GERBER, C ;

GIMZEWSKI, JK .

NATURE, 1994, 372 (6501) :79-81

[3] A FEMTOJOULE CALORIMETER USING MICROMECHANICAL SENSORS [J].

BARNES, JR ;

STEPHENSON, RJ ;

WOODBURN, CN ;

OSHEA, SJ ;

WELLAND, ME ;

RAYMENT, T ;

GIMZEWSKI, JK ;

GERBER, C .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (12) :3793-3798

[4] Fluorescent microthermal imaging - Theory and methodology for achieving high thermal resolution images [J].

Barton, DL ;

Tangyunyong, P .

MICROELECTRONIC ENGINEERING, 1996, 31 (1-4) :271-279

[5] Thermal analysis using a micromechanical calorimeter [J].

Berger, R ;

Gerber, C ;

Gimzewski, JK ;

Meyer, E ;

Guntherodt, HJ .

APPLIED PHYSICS LETTERS, 1996, 69 (01) :40-42

[6] ATOMIC FORCE MICROSCOPE [J].

BINNIG, G ;

QUATE, CF ;

GERBER, C .

PHYSICAL REVIEW LETTERS, 1986, 56 (09) :930-933

[7] SURFACE STUDIES BY SCANNING TUNNELING MICROSCOPY [J].

BINNING, G ;

ROHRER, H ;

GERBER, C ;

WEIBEL, E .

PHYSICAL REVIEW LETTERS, 1982, 49 (01) :57-61

[8] SCANNING CAPACITANCE MICROSCOPY [J].

BUGG, CD ;

KING, PJ .

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1988, 21 (02) :147-151

[9]

CALLAN MB, 1985, THERMODYNAMICS INTRO, pCH4

[10]

Claeys W., 1993, Quality and Reliability Engineering International, V9, P303, DOI 10.1002/qre.4680090411

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