The fabrication of high resolution features by mould injection

This paper describes work carried out to develop a relatively simple procedure to mass produce high resolution and large area features in polymer by mould injection. Fabrication of the injection mould using high resolution electron beam lithography is described and the results of production runs evaluated. Feature sizes of less than 100 nm were obtained and 4 centimetre long 1:1 gratings with periods down to 1 mu m produced. Features with high aspect ratio proved difficult to form routinely however it is envisaged that further optimization of the process will resolve these difficulties. It is our belief that the ultimate resolution of this technique is limited largely by the quality of mould tool manufacturing.