Large-scale manufacturing of nanoscale multilayered hard coatings deposited by cathodic arc/unbalanced magnetron sputtering

被引：56

作者：

Münz, WD ^{[1
]}

机构：

[1] Sheffield Hallam Univ, Surface Engn Res Grp, Sheffield S1 1WB, S Yorkshire, England

来源：

MRS BULLETIN | 2003年 / 28卷 / 03期

关键词：

anticorrosion properties; cathodic arc/unbalanced magnetron (CA/UBM) sputtering; friction reduction; nanoscale multilayers; physical vapor deposition (PVD); superhard coating materials; superlattices; wear resistance;

D O I：

10.1557/mrs2003.58

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Nanoscale multilayered (superlattice) hard coatings can be manufactured in a plastic hardness range (HP) between 25 GPa and 55 GPa by a combination of cathodic arc evaporation and unbalanced magnetron sputtering (arc bond sputter technology). Using large-scale industrial physical vapor deposition (PVD) equipment and a sufficiently high pumping speed, multilayered coatings can be deposited by simultaneously operating cathodes without special shutter and shielding facilities in a common reactive-gas atmosphere. The efficiency of the process is in many cases identical to that of TiN and CrN. Temperature-resistant, wear-resistant, and corrosion-resistant coatings of various compositions have been produced under industrial conditions. So far, the main applications concentrate on metal-forming and on cutting die steel, Inconel, stainless steel, and titanium. Applications have also been found in the chemical, textile, medical, and automotive industries.

引用

页码：173 / 179

页数：7

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