Detection of gases with arrays of micromachined tin oxide gas sensors

被引：26

作者：

Cané, C

Gràcia, I

Götz, A

Fonseca, L

Lora-Tamayo, E

Horrillo, MC

Sayago, I

Robla, JI

Rodrigo, J

Gutiérrez, J

机构：

[1] CSIC, IMB, Ctr Nacl Microelect, Bellaterra 08193, Spain

[2] CSIC, CETEF, IFA, Lab Sensores, E-28006 Madrid, Spain

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2000年 / 65卷 / 1-3期

关键词：

detection of gases; micromachined tin oxide; gas sensors;

D O I：

10.1016/S0925-4005(99)00314-7

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A good detection of NO2, CO and toluene at low concentrations has been carried out by using a micromachined gas sensor array composed of three devices working at different temperatures. The structure is fabricated using standard microelectronic technologies and tin oxide layers as sensitive material. The total power consumption of the array is in the range of 150 mW and a good uniformity of temperature is achieved, thanks to a silicon plug placed under the active area of each sensor. With this device type, it is possible to discriminate gases in a mixture when each array microsensor is heated at a proper temperature. (C) 2000 Elsevier Science S.A. All rights reserved.

引用

页码：244 / 246

页数：3

共 7 条

[1] Investigation, for NH3 gas sensing applications, of the Nb2O5 semiconducting oxide in the presence of interferent species such as oxygen and humidity [J].