Soft imprinting: Creating highly ordered porous anodic alumina templates on substrates for nanofabrication

被引：31

作者：

Chong, Ai Shing Maria ^{[1
]}

Tan, Lee Kheng ^{[1
]}

Deng, Jie ^{[1
]}

Gao, Han ^{[1
]}

机构：

[1] Inst Mat Res & Engn, Singapore 117602, Singapore

来源：

ADVANCED FUNCTIONAL MATERIALS | 2007年 / 17卷 / 10期

关键词：

D O I：

10.1002/adfm.200600993

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

We demonstrate a "soft-imprinting" method for the fabrication of highly ordered porous anodic alumina (HOPAA) templates on different substrates (such as Si, glass slides, and flexible polyimide films) over large areas (> 1.5 cm(2)). In this process, Ar plasma etching is employed to soft imprint an evaporated Al film on the substrates using a free-standing HOPAA template as a mask, thus creating ordered nanoindentations on the At surface. The ordered nanoindentat ions in turn guide the subsequent anodization of At to generate HOPAA templates on the substrates (HOPAA-substrates), which inherit the pattern of the freestanding HOPAA mask. This soft-imprinting technique is also applicable to the fabrication of HOPAA on flexible polymer films. To demonstrate the potential uses of the HOPAA-substrates in nanofabrication, highly ordered Au nanowire arrays are fabricated on a Si substrate and TiO2 nanotube arrays are prepared on a glass substrate via solution- and vapor-based fabrication processes, respectively.

引用

页码：1629 / 1635

页数：7

共 36 条

[1] Direct formation of self-assembled nanoporous aluminium oxide on SiO2 and Si substrates [J].

Cai, AL ;

Zhang, HY ;

Hua, H ;

Zhang, ZB .

NANOTECHNOLOGY, 2002, 13 (05) :627-630

[2] Monodisperse metal nanowire arrays on Si by integration of template synthesis with silicon technology [J].

Choi, JS ;

Sauer, G ;

Göring, P ;

Nielsch, K ;

Wehrspohn, RB ;

Gösele, U .

JOURNAL OF MATERIALS CHEMISTRY, 2003, 13 (05) :1100-1103

[3]

Chu SZ, 2002, ADV MATER, V14, P1752, DOI 10.1002/1521-4095(20021203)14:23<1752::AID-ADMA1752>3.0.CO

[4]

2-1

[5] Self-ordered pore structure of anodized aluminum on silicon and pattern transfer [J].

Crouse, D ;

Lo, YH ;

Miller, AE ;

Crouse, M .

APPLIED PHYSICS LETTERS, 2000, 76 (01) :49-51

[6] Gold nanoparticles: Assembly, supramolecular chemistry, quantum-size-related properties, and applications toward biology, catalysis, and nanotechnology [J].

Daniel, MC ;

Astruc, D .

CHEMICAL REVIEWS, 2004, 104 (01) :293-346

[7] Faceted and vertically aligned GaN nanorod arrays fabricated without catalysts or lithography [J].

Deb, P ;

Kim, H ;

Rawat, V ;

Oliver, M ;

Kim, S ;

Marshall, M ;

Stach, E ;

Sands, T .

NANO LETTERS, 2005, 5 (09) :1847-1851

[8] Highly ordered nanosphere imprinted nanochannel alumina (NINA) [J].

Fournier-Bidoz, S ;

Kitaev, V ;

Routkevitch, D ;

Manners, I ;

Ozin, GA .

ADVANCED MATERIALS, 2004, 16 (23-24) :2193-+

[9] Field emission of large-area and graphitized carbon nanotube array on anodic aluminum oxide template [J].

Gao, H ;

Mu, C ;

Wang, F ;

Xu, DS ;

Wu, K ;

Xie, YC ;

Liu, S ;

Wang, EG ;

Xu, J ;

Yu, DP .

JOURNAL OF APPLIED PHYSICS, 2003, 93 (09) :5602-5605

[10] Template-assisted patterning of nanoscale self-assembled monolayer arrays on surfaces [J].

Gao, Han ;

Gosvami, Nitya N. ;

Deng, Jie ;

Tan, Le-Shon ;

Sander, Melissa S. .

LANGMUIR, 2006, 22 (19) :8078-8082

← 1 2 3 4 →