A compact multipurpose nanomanipulator for use inside a scanning electron microscope

被引：26

作者：

Heeres, E. C. ^{[1
]}

Katan, A. J. ^{[1
]}

van Es, M. H. ^{[1
]}

Beker, A. F. ^{[1
]}

Hesselberth, M. ^{[1
]}

van der Zalm, D. J. ^{[1
]}

Oosterkamp, T. H. ^{[1
,2
]}

机构：

[1] Leiden Univ, Leiden Inst Phys, NL-2333 CA Leiden, Netherlands

[2] Leiden Probe Microscopy, NL-2333 CA Leiden, Netherlands

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2010年 / 81卷 / 02期

关键词：

etching; manipulators; nanotechnology; scanning electron microscopes; scanning probe microscopy; welding; NANOTUBES; BEAM;

D O I：

10.1063/1.3271033

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A compact, two-stage nanomanipulator was designed and built for use inside a scanning electron microscope. It consists of a fine stage employing piezostacks that provide a 15 mu m range in three dimensions and a coarse stage based on commercially available stick-slip motors. Besides the fabrication of enhanced probes for scanning probe microscopy and the enhancement of electron field emitters, other novel manipulation processes were developed, such as locating, picking up, and positioning small nanostructures with an accuracy of similar to 10 nm. In combination with in situ I-V experiments, welding, and etching, this results in a multipurpose nanofactory, enabling a new range of experiments.

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页数：4

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