Influence of Coulomb interactions on current density distribution in a two-lens focused ion beam system

被引：13

作者：

Bi, J ^{[1
]}

de Jager, PWH ^{[1
]}

Barth, JE ^{[1
]}

Kruit, P ^{[1
]}

机构：

[1] Delft Univ Technol, Dept Appl Phys, NL-2628 CJ Delft, Netherlands

来源：

MICROELECTRONIC ENGINEERING | 1998年 / 42卷

关键词：

D O I：

10.1016/S0167-9317(98)00057-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Focused ion beam systems equipped with a liquid metal ion source suffer strongly from the Coulomb interactions between ions. The Coulomb interactions not only deteriorate the probe size, but also cause a wider tail on the current density distribution. In this paper we theoretically and experimentally investigate what role the Coulomb interactions play in the tail of the current density distribution.

引用

页码：249 / 252

页数：4

共 5 条

[1] Theoretical and experimental investigations on Coulomb interactions in a two-lens focussed ion beam instrument [J].

Bi, J ;

Jiang, XR ;

Kruit, P .

MICROELECTRONIC ENGINEERING, 1997, 35 (1-4) :439-442

[2]

Cummings K. D., 1986, Proceedings of the SPIE - The International Society for Optical Engineering, V632, P93, DOI 10.1117/12.963673

[3]

JANSEN GH, 1991, ADV ELECT ELECT PH S, V21

[4] SUB-20-NM-WIDE LINE FABRICATION IN POLY(METHYLMETHACRYLATE) USING A GA+ MICROPROBE [J].

KUBENA, RL ;

STRATTON, FP ;

WARD, JW ;

ATKINSON, GM ;

JOYCE, RJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1989, 7 (06) :1798-1801

[5] TRANSVERSE THERMAL VELOCITY BROADENING OF FOCUSED BEAMS FROM LIQUID-METAL ION SOURCES [J].

WARD, JW ;

KUBENA, RL ;

UTLAUT, MW .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (06) :2090-2094

← 1 →